{"id":67425,"date":"2024-03-25T14:22:39","date_gmt":"2024-03-25T06:22:39","guid":{"rendered":"https:\/\/www.cnledw.com\/?p=67425"},"modified":"2024-03-25T14:23:13","modified_gmt":"2024-03-25T06:23:13","slug":"semicon2024%e6%94%b6%e5%ae%98%ef%bc%8c%e7%ac%ac%e4%b8%89%e4%bb%a3%e5%8d%8a%e5%af%bc%e4%bd%93%e8%b5%9b%e9%81%93%e7%ab%9e%e4%ba%89%e6%bf%80%e7%83%88","status":"publish","type":"post","link":"https:\/\/www.cnledw.com\/Exhibition\/newsdetail-67425.html","title":{"rendered":"SEMICON2024\u6536\u5b98\uff0c\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u8d5b\u9053\u7ade\u4e89\u6fc0\u70c8"},"content":{"rendered":"<p>3\u670820\u65e5\uff0c\u6625\u5206\u65f6\u671f\uff0c\u4e07\u7269\u590d\u82cf\uff0cSEMICON China 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none;\"><\/figcaption><\/figure>\n<p><strong>\u5929\u79d1\u5408\u8fbe<\/strong><\/p>\n<p>\u5929\u79d1\u5408\u8fbe\u516c\u5f00\u5c55\u51fa\u4e866-8\u82f1\u5bf8\u7684\u78b3\u5316\u7845\u886c\u5e95\uff0c\u5e76\u9996\u6b21\u5c55\u793a8\u82f1\u5bf8\u78b3\u5316\u7845\u5916\u5ef6\u7247\u4ea7\u54c1\uff0c\u5176\u4e2d8\u82f1\u5bf8\u4ea7\u54c1\u5305\u62ecN\u5f62SiC\u886c\u5e95\u3001SiC\u5916\u5ef6\u7247\u7b49\uff0c\u5e76\u73b0\u573a\u62ab\u9732\u4e86\u76f4\u5f84\u3001\u6676\u578b\u3001\u539a\u5ea6\u7b49\u76f8\u5173\u53c2\u6570\u30022023\u5e745\u6708\uff0c\u5929\u79d1\u5408\u8fbe\u4e0e\u82f1\u98de\u51cc\u7b7e\u8ba2\u4e86\u4e00\u4efd\u957f\u671f\u534f\u8bae\uff0c\u5176\u5c06\u4e3a\u82f1\u98de\u51cc\u4f9b\u5e94\u7528\u4e8e\u5236\u9020\u78b3\u5316\u7845\u534a\u5bfc\u4f53\u4ea7\u54c1\u76846\u82f1\u5bf8\u78b3\u5316\u7845\u886c\u5e95\u548c\u6676\u952d\uff0c\u5176\u4f9b\u5e94\u91cf\u9884\u8ba1\u5c06\u5360\u5230\u82f1\u98de\u51cc\u957f\u671f\u9700\u6c42\u91cf\u7684\u4e24\u4f4d\u6570\u4efd\u989d\u3002\u6839\u636e\u8be5\u534f\u8bae\uff0c\u7b2c\u4e00\u9636\u6bb5\u5c06\u4fa7\u91cd\u4e8e6\u82f1\u5bf8\u78b3\u5316\u7845\u6750\u6599\u7684\u4f9b\u5e94\uff0c\u4f46\u5929\u79d1\u5408\u8fbe\u4e5f\u5c06\u63d0\u4f9b8\u82f1\u5bf8\u78b3\u5316\u7845\u6750\u6599\uff0c\u52a9\u529b\u82f1\u98de\u51cc\u54118\u82f1\u5bf8\u6676\u5706\u8fc7\u6e21\u3002<\/p>\n<figure class=\"aligncenter no-info-img\"><img decoding=\"async\" loading=\"lazy\" class=\"aligncenter\" src=\"https:\/\/img.cnledw.com\/wp-content\/uploads\/2024\/03\/4.png\" alt=\"\" width=\"503\" height=\"273\" \/><figcaption style=\"display: none;\"><\/figcaption><\/figure>\n<p>2023\u5e748\u6708\uff0c\u5929\u79d1\u5408\u8fbe\u5168\u8d44\u5b50\u516c\u53f8\u6c5f\u82cf\u5929\u79d1\u5408\u8fbe\u78b3\u5316\u7845\u886c\u5e95\u4e8c\u671f\u6269\u4ea7\u9879\u76ee\u5f00\u5de5\u3002\u636e\u6089\uff0c\u6c5f\u82cf\u5929\u79d1\u5408\u8fbe\u4e8c\u671f\u9879\u76ee\u5c06\u65b0\u589e16\u4e07\u7247\u78b3\u5316\u7845\u886c\u5e95\u4ea7\u80fd\uff0c\u5e76\u8ba1\u5212\u4eca\u5e746\u6708\u5efa\u8bbe\u5b8c\u6210\uff0c8\u6708\u7ae3\u5de5\u6295\u4ea7\uff0c\u5c4a\u65f6\u6c5f\u82cf\u5929\u79d1\u5408\u8fbe\u603b\u4ea7\u80fd\u5c06\u8fbe\u523023\u4e07\u7247\u3002<\/p>\n<p><strong>\u5929\u57df\u534a\u5bfc\u4f53<\/strong><\/p>\n<p>\u6b64\u6b21\u5c55\u4f1a\u73b0\u573a\uff0c\u5929\u57df\u534a\u5bfc\u4f53\u91cd\u70b9\u5c55\u793a\u4e866\/8\u82f1\u5bf8SiC\u5916\u5ef6\u7247\u3001SiC MOS\u7ba1\u7b49\u4ea7\u54c1\u3002\u5b98\u65b9\u8868\u793a\uff0c\u516c\u53f8\u4e8e2021\u5e74\u5f00\u59cb\u4e868\u82f1\u5bf8\u7684\u6280\u672f\u50a8\u5907\uff0c\u4e8e2023\u5e747\u6708\u8fdb\u884c\u4e868\u82f1\u5bf8\u5916\u5ef6\u7247\u7684\u4ea7\u54c1\u7684\u5c0f\u6279\u91cf\u9001\u6837\uff1b\u8d85\u8fc7\u5343\u7247\u7684\u91cf\u4ea7\u6570\u636e\u8868\u660e8\u82f1\u5bf8SiC\u5916\u5ef6\u6c34\u5e73\u4e0e6\u82f1\u5bf8\u5916\u5ef6\u6c34\u5e73\u76f8\u5f53\u3002<\/p>\n<figure class=\"aligncenter no-info-img\"><img decoding=\"async\" loading=\"lazy\" class=\"aligncenter\" src=\"https:\/\/img.cnledw.com\/wp-content\/uploads\/2024\/03\/5-1024x526.png\" alt=\"\" width=\"504\" height=\"259\" \/><figcaption style=\"display: none;\"><\/figcaption><\/figure>\n<p><strong>\u5929\u6210\u534a\u5bfc\u4f53<\/strong><\/p>\n<p>\u5929\u6210\u534a\u5bfc\u4f53\u5df2\u5b8c\u62106\u30018\u82f1\u5bf8SiC\u5355\u6676\u886c\u5e95\u6280\u672f\u653b\u5173\uff0c\u5728\u672c\u6b21\u5c55\u4f1a\u5c55\u51fa\u4e868\u5bf8\u5bfc\u7535\u578bSiC\u886c\u5e95\u3002\u636e\u6089\uff0c\u65b0\u5f00\u53d1\u76846\u82f1\u5bf8\u5bfc\u7535\u578bSiC\u886c\u5e95\u90e8\u5206TSD\u7f3a\u9677\u5bc6\u5ea6\u4f4e\u81f30\u4e2a\/cm2\uff0c\u90e8\u5206\u81f4\u547d\u6027\u7f3a\u9677BPD\u5219\u4f4e\u81f332\u4e2a\/cm2\uff1b\u800c\u5728\u91cf\u4ea7\u8fc7\u7a0b\u4e2d\uff0c\u53ef\u4ee5\u505a\u523065%\u7684\u886c\u5e95\u4ea7\u54c1TSD\uff1c100\u4e2a\/cm2\u3001BPD\uff1c100\u4e2a\/cm2\u3002<\/p>\n<figure class=\"aligncenter no-info-img\"><img decoding=\"async\" loading=\"lazy\" class=\"aligncenter\" src=\"https:\/\/img.cnledw.com\/wp-content\/uploads\/2024\/03\/6-1024x576.png\" alt=\"\" width=\"508\" height=\"286\" \/><figcaption style=\"display: none;\"><\/figcaption><\/figure>\n<p><strong>\u4e2d\u7535\u79d1\u6750\u6599<\/strong><\/p>\n<p>\u5c71\u897f\u70c1\u79d1\u3001\u6cb3\u5317\u666e\u5174\u3001\u5357\u4eac\u56fd\u76db\u7535\u5b50\u5747\u4e3a\u4e2d\u7535\u79d1\u534a\u5bfc\u4f53\u6750\u6599\u7684\u5b50\u516c\u53f8\u3002\u5c55\u4f1a\u4e2d\uff0c\u5c71\u897f\u70c1\u79d1\u5c55\u793a6\/8\u82f1\u5bf8N\u578b\u53ca\u9ad8\u7eaf\u534a\u7edd\u7f18\u578bSiC\u886c\u5e95\u4ea7\u54c1\uff0c\u91cd\u70b9\u5c55\u793a\u4e86350\u5fae\u7c73\u539a8\u82f1\u5bf8\u78b3\u5316\u7845\u886c\u5e95\u3002\u5176\u4e3b\u8425\u4ea7\u54c1\u5305\u542b\u9ad8\u7eaf\u534a\u7edd\u7f18\u78b3\u5316\u7845\u5355\u6676\u886c\u5e95\u3001N\u578b\u78b3\u5316\u7845\u5355\u6676\u886c\u5e95\u3001\u78b3\u5316\u7845\u6676\u4f53\u7b49\u3002\u636e\u6089\uff0c\u51764\u82f1\u5bf8\u9ad8\u7eaf\u534a\u7edd\u7f18\u78b3\u5316\u7845\u886c\u5e95\u56fd\u5185\u5e02\u573a\u5360\u6709\u7387\u8d8550%\uff0c6\u82f1\u5bf8N\u578b\u78b3\u5316\u7845\u886c\u5e95\u5df2\u5b9e\u73b0\u4ea7\u4e1a\u5316\uff0c\u516c\u53f8\u8fd8\u662f\u56fd\u5185\u7b2c\u4e00\u5bb6\u751f\u4ea7\u51fa8\u82f1\u5bf8N\u578b\u78b3\u5316\u7845\u886c\u5e95\u548c8\u82f1\u5bf8\u9ad8\u7eaf\u534a\u7edd\u7f18\u78b3\u5316\u7845\u886c\u5e95\u7684\u516c\u53f8\uff0c\u4ea7\u4e1a\u89c4\u6a21\u53ca\u5de5\u827a\u6280\u672f\u8fbe\u56fd\u9645\u5148\u8fdb\u6c34\u5e73\u3002<\/p>\n<p>\u672c\u6b21\u5c55\u4f1a\u4e0a\uff0c\u56fd\u76db\u7535\u5b50\u5219\u5c55\u793a\u4e86\u51768\u82f1\u5bf8Si\u548c\u6c2e\u5316\u9553\u5916\u5ef6\u7247\uff0c\u53bb\u5e7412\u670822\u65e5\uff0c\u56fd\u76db\u7535\u5b50\u5357\u4eac\u5916\u5ef6\u6750\u6599\u4ea7\u4e1a\u57fa\u5730\u9879\u76ee\u7b2c\u4e00\u679a\u7845\u57fa\u6c2e\u5316\u9553\uff08GaN on Si\uff09\u5916\u5ef6\u7247\u6b63\u5f0f\u4e0b\u7ebf\u3002\u636e\u6089\uff0c\u8be5\u516c\u53f8\u62e5\u6709LPE\u3001Gemini\u7b49\u516c\u53f8\u751f\u4ea7\u7684\u591a\u79cd\u578b\u53f7\u5916\u5ef6\u7089\uff0c\u4e3b\u8981\u4ea7\u54c1\u5305\u542b\u5217\u4ece3\u82f1\u5bf8\u52308\u82f1\u5bf8\u7684P\u578b\u548cN\u578b\u5916\u5ef6\u7247\uff0c\u4ea7\u80fd\u4e3a8\u4e07\u7247\/\u6708(4\u82f1\u5bf8\u7b49\u6548)\u3002<\/p>\n<p>\u666e\u5174\u7535\u5b50\u5c55\u793a\u4e86\u6700\u65b0\u76846\/8\u82f1\u5bf8SiC\u5916\u5ef6\u7247\u4ea7\u54c1\u3002\u4f5c\u4e3a\u56fd\u5185\u5916\u5ef6\u6750\u79d1\u9886\u5148\u4f01\u4e1a\uff0c\u666e\u5174\u7535\u5b50\u4e3b\u8981\u4ea7\u54c1\u4e3a\u5404\u79cd\u89c4\u683c\u578b\u53f7\u7684\u7845\u57fa\u5916\u5ef6\u7247\u3001\u78b3\u5316\u7845\u5916\u5ef6\u7247\uff0c\u636e\u6089\u5176\u5927\u5c3a\u5bf8650V-6500V SiC \u5916\u5ef6\u7247\u5df2\u5b9e\u73b0\u91cf\u4ea7\u3002<\/p>\n<figure class=\"aligncenter no-info-img\"><img decoding=\"async\" loading=\"lazy\" class=\"aligncenter\" src=\"https:\/\/img.cnledw.com\/wp-content\/uploads\/2024\/03\/7.png\" alt=\"\" width=\"508\" height=\"279\" \/><figcaption style=\"display: none;\"><\/figcaption><\/figure>\n<p><strong>\u4e2d\u73af\u9886\u5148<\/strong><\/p>\n<p>\u4e2d\u73af\u9886\u5148\u643a4-12\u82f1\u5bf8\u5316\u8150\u7247\u3001\u629b\u5149\u7247\u3001\u9000\u706b\u7247\u3001\u5916\u5ef6\u7247\u3001SOI\u7247\u7b49\u5168\u4ea7\u54c1\u7cfb\u5217\u4eae\u76f8\u5c55\u4f1a\uff0c\u5176\u4e2d\u5c55\u793a\u4e866\/8\u82f1\u5bf8SiC\u3001GaN\u5916\u5ef6\u7247\u3002\u636e\u6089\uff0c\u4e2d\u73af\u9886\u5148\u4e13\u6ce8\u4e8e\u534a\u5bfc\u4f53\u6750\u6599\u53ca\u5176\u5ef6\u4f38\u4ea7\u4e1a\u9886\u57df\u7684\u7814\u53d1\u548c\u5236\u9020\uff0c\u76ee\u524d\u5176\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u6750\u6599\u4ea7\u54c1\u8fd8\u5728\u52a0\u7801\u7814\u53d1\u4e2d\u3002<\/p>\n<figure class=\"aligncenter no-info-img\"><img decoding=\"async\" loading=\"lazy\" class=\"aligncenter\" src=\"https:\/\/img.cnledw.com\/wp-content\/uploads\/2024\/03\/8-1.png\" alt=\"\" width=\"502\" height=\"274\" \/><figcaption style=\"display: none;\"><\/figcaption><\/figure>\n<p><strong>\u8d3a\u5229\u6c0f<\/strong><\/p>\n<p>\u8d3a\u5229\u6c0f\uff08Zadient\uff09\u73b0\u573a\u5c55\u793a\u4e86\u5305\u62ec\u70e7\u7ed3\u818f\u3001\u94dc\u7ebf\u3001\u5927\u9762\u79ef\u70e7\u7ed3\u6280\u672f\u4e43\u81f3Die Top System(DTS)\u6750\u6599\u7cfb\u7edf\u5728\u5185\u7684\u5b8c\u6574\u89e3\u51b3\u65b9\u6848\uff0c\u53ef\u8986\u76d6\u65b0\u4e00\u4ee3\u78b3\u5316\u7845\u529f\u7387\u6a21\u5757\u5c01\u88c5\u7684\u5404\u7c7b\u5de5\u7a0b\u9700\u6c42\u30022023\u5e7411\u6708\uff0c\u8d3a\u5229\u6c0f\u5ba3\u5e03\u6536\u8d2d\u4e86\u4e00\u5bb6\u521d\u521b\u4f01\u4e1aZadient Technologies\uff0c\u5ba3\u544a\u8fdb\u5165\u78b3\u5316\u7845\u7c89\u6599\u548c\u78b3\u5316\u7845\u6676\u952d\u751f\u957f\u9886\u57df\u3002\u636e\u6089\uff0cZadient\u6210\u7acb\u4e8e2020\u5e74\uff0c\u662f\u4e00\u5bb6\u6cd5\u5fb7\u5408\u8d44\u7684\u78b3\u5316\u7845\u6e90\u7c89\u5382\u5546\uff0c\u4e0d\u540c\u4e8e\u56fd\u5185\u4e3b\u6d41\u7684\u81ea\u8513\u5ef6\u78b3\u5316\u7845\u7c89\u6599\u5408\u6210\u65b9\u6cd5\uff0cZadient\u516c\u53f8\u662f\u901a\u8fc7\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08CVD\uff09\u5de5\u827a\u751f\u4ea7\u9ad8\u7eaf\u5ea6\u78b3\u5316\u7845\u6e90\u6750\u6599\u3002<\/p>\n<figure class=\"aligncenter no-info-img\"><img decoding=\"async\" class=\"aligncenter\" src=\"https:\/\/img.cnledw.com\/wp-content\/uploads\/2024\/03\/9.png\" alt=\"\" \/><figcaption style=\"display: none;\"><\/figcaption><\/figure>\n<p><strong>\u6cb3\u5317\u540c\u5149\u80a1\u4efd<\/strong><\/p>\n<p>\u540c\u5149\u80a1\u4efd\u5728\u73b0\u573a\u5c55\u793a\u4e866\/8\u82f1\u5bf8\u9ad8\u8d28\u91cf\u78b3\u5316\u7845\u6676\u952d\u548c\u886c\u5e95\u3002\u636e\u6089\uff0c\u8be5\u516c\u53f8\u4e3b\u8981\u4ea7\u54c1\u5305\u62ec\u5bfc\u7535\u578b\u3001\u534a\u7edd\u7f18\u578b\u78b3\u5316\u7845\u886c\u5e95\u3002\u76ee\u524d\uff0c\u540c\u5149\u80a1\u4efd\u5df2\u638c\u63e1\u78b3\u5316\u7845\u6676\u4f53\u89c4\u6a21\u5316\u91cf\u4ea7\u5173\u952e\u6280\u672f\uff0c\u5f15\u8fdb\u4e86\u56fd\u5185\u5916\u5148\u8fdb\u886c\u5e95\u52a0\u5de5\u53ca\u68c0\u6d4b\u8bbe\u5907\uff0c\u5168\u9762\u5bfc\u5165\u548c\u63a8\u884cISO9001\u3001IATF16949\u8d28\u91cf\u7ba1\u7406\u4f53\u7cfb\uff0c\u5f62\u6210\u4e86\u4e13\u4e1a\u3001\u5148\u8fdb\u3001\u5b8c\u6574\u3001\u7a33\u5b9a\u7684\u78b3\u5316\u7845\u886c\u5e95\u751f\u4ea7\u7ebf\u3002<\/p>\n<p><strong>\u5357\u4eac\u767e\u8bc6\u7535\u5b50<\/strong><\/p>\n<p>\u5c55\u4f1a\u4e0a\uff0c\u767e\u8bc6\u7535\u5b50\u5c55\u793a\u4e86\u51766-8\u82f1\u5bf8\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u5916\u5ef6\u4ea7\u54c1\u3002\u767e\u8bc6\u7535\u5b50\u6210\u7acb\u4e8e2019\u5e748\u6708\uff0c\u4e3b\u8981\u751f\u4ea7\u78b3\u5316\u7845\u53ca\u6c2e\u5316\u9553\u76f8\u5173\u5916\u5ef6\u7247\uff0c\u5305\u542bGaN on Silicon\u3001GaN on Sic\u4ee5\u53caSiC on SiC\uff0c\u6db5\u76d6\u529f\u7387\u4ee5\u53ca\u5c04\u9891\u5fae\u6ce2\u7b49\u5e94\u7528\u3002<\/p>\n<p><strong>\u6df1\u5733\u4e2d\u673a\u65b0\u6750<\/strong><\/p>\n<p>\u6df1\u5733\u4e2d\u673a\u65b0\u6750\u643a\u78b3\u5316\u7845\u6676\u5706\u5207\u78e8\u629b\u8017\u6750\u65b9\u6848\u4e2d\u7684\u5927\u90e8\u5206\u6837\u54c1\u6765\u5230\u5c55\u4f1a\uff0c\u4e2d\u673a\u65b0\u6750\u662f\u4e00\u5bb6\u4e13\u6ce8\u4e8e\u9ad8\u786c\u8106\u6750\u6599\u548c\u9ad8\u6027\u80fd\u7814\u78e8\u629b\u5149\u6750\u6599\u7684\u6280\u672f\u7814\u53d1\u3001\u751f\u4ea7\u53ca\u9500\u552e\u7684\u9ad8\u65b0\u6280\u672f\u4f01\u4e1a\u3002\u5c24\u5176\u5728\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u6676\u5706\u7814\u78e8\u629b\u5149\u5e94\u7528\u9886\u57df\uff0c\u516c\u53f8\u53d6\u5f97\u591a\u9879\u5173\u952e\u6027\u6280\u672f\u7a81\u7834\u3002<\/p>\n<p><strong>\u4e8c\u3001\u8bbe\u5907\uff1a\u9f99\u5934\u4f01\u4e1a\u9887\u591a\uff0c\u56fd\u4ea7\u8bbe\u5907\u5382\u5546\u52a0\u901f\u8ffd\u8d76<\/strong><\/p>\n<p>\u5c55\u4f1a\u73b0\u573a\u8bb8\u591a\u5168\u7403\u77e5\u540d\u8bbe\u5907\u5382\u5546\u73b0\u573a\u5c55\u51fa\u4e86\u5176\u4ee3\u8868\u6027\u4ea7\u54c1\uff0c\u5982\u6676\u76db\u673a\u7535\u3001\u4e2d\u5fae\u516c\u53f8\u3001\u7231\u53d1\u79d1\u7b49\u7b49\u3002<\/p>\n<p>3\u670820\u65e5\uff0cSEMI\u4e5f\u516c\u5e03\u4e86\u5176\u6700\u65b0\u4e00\u5b63\u5ea6\u7684\u534a\u5bfc\u4f53\u8bbe\u5907\u62a5\u544a\uff0c\u62a5\u544a\u663e\u793a\u5168\u7403 12 \u82f1\u5bf8\u6676\u5706\u5382\uff08\u524d\u7aef\uff09\u8bbe\u5907\u6295\u8d44\u5c06\u4e8e\u660e\u5e74\u7a81\u7834\u5343\u4ebf\u7f8e\u5143\u5927\u5173\uff0c\u800c\u5728 2027 \u5e74\u5c06\u8fbe\u521b\u7eaa\u5f55\u7684 1370 \u4ebf\u7f8e\u5143\uff08\u7ea6 9864 \u4ebf\u5143\u4eba\u6c11\u5e01\uff09\u3002\u636e\u6089\uff0c2025 \u5e74\u5168\u7403 12 \u82f1\u5bf8\u6676\u5706\u5382\u7684\u8bbe\u5907\u6295\u8d44\u5c06\u8f83\u4eca\u5e74\u5927\u589e 20%\uff0c\u6da8\u5e45\u5c06\u521b 2021 \u5e74\u4ee5\u6765\u7684\u65b0\u9ad8\uff1b\u800c\u5728 2026 \u548c 2027 \u5e74\u5c06\u5206\u522b\u589e\u957f 12% \u548c 5%\u3002SEMI \u8868\u793a\uff0c\u534a\u5bfc\u4f53\u884c\u4e1a\u524d\u7aef\u8bbe\u5907\u6295\u8d44\u7684\u589e\u52a0\u5f97\u76ca\u4e8e\u591a\u91cd\u56e0\u7d20\uff0c\u5305\u62ec\u5b58\u50a8\u9886\u57df\u5e02\u573a\u7684\u590d\u82cf\u548c\u5bf9\u9ad8\u6027\u80fd\u8ba1\u7b97\uff08HPC\uff09\u548c\u6c7d\u8f66\u5e94\u7528\u7684\u5f3a\u52b2\u9700\u6c42\u3002<\/p>\n<p><strong>\u6676\u76db\u673a\u7535<\/strong><\/p>\n<p>\u672c\u6b21\u5c55\u4f1a\u4e2d\uff0c\u6676\u76db\u673a\u7535\u53d1\u5e03\u4e868\u82f1\u5bf8\u53cc\u7247\u5f0f\u78b3\u5316\u7845\u5916\u5ef6\u8bbe\u5907\u30018\u82f1\u5bf8\u78b3\u5316\u7845\u91cf\u6d4b\u8bbe\u5907\u300112\u82f1\u5bf8\u5168\u81ea\u52a8\u51cf\u8584\u629b\u5149\u8bbe\u5907\u4e09\u6b3e\u65b0\u54c1\u3002\u636e\u6089\uff0c\u8be5\u516c\u53f8\u56f4\u7ed5\u201c\u5148\u8fdb\u6750\u6599\u3001\u5148\u8fdb\u88c5\u5907\u201d\u7684\u53cc\u5f15\u64ce\u53ef\u6301\u7eed\u53d1\u5c55\u6218\u7565\uff0c\u6301\u7eed\u6df1\u5316\u201c\u88c5\u5907+\u6750\u6599\u201d\u7684\u534f\u540c\u4ea7\u4e1a\u5e03\u5c40\u3002\u5728\u96c6\u6210\u7535\u8def\u7528\u5927\u7845\u7247\u9886\u57df\uff0c\u4e3a\u884c\u4e1a\u63d0\u4f9b\u6574\u4f53\u8bbe\u5907\u89e3\u51b3\u65b9\u6848\uff1b\u5728\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u9886\u57df\uff0c\u516c\u53f8\u805a\u71266-8\u82f1\u5bf8\u78b3\u5316\u7845\u886c\u5e95\u7684\u4ea7\u4e1a\u5316\uff0c\u81f4\u529b\u4e8e\u4ece\u957f\u6676-\u5207\u78e8\u629b-\u5916\u5ef6\u5168\u94fe\u6761\u8bbe\u5907\u7684\u56fd\u4ea7\u66ff\u4ee3\uff1b\u5728\u5148\u8fdb\u5236\u7a0b\u9886\u57df\uff0c\u56f4\u7ed5CVD\u7b49\u6838\u5fc3\u8bbe\u5907\u8fdb\u884c\u7814\u53d1\uff0c\u5ef6\u4f38\u534a\u5bfc\u4f53\u4ea7\u4e1a\u94fe\u9ad8\u7aef\u88c5\u5907\u4ea7\u54c1\u5e03\u5c40\uff0c\u575a\u6301\u201c\u5f3a\u94fe\u8865\u94fe\u201d\u63a8\u52a8\u534a\u5bfc\u4f53\u4ea7\u4e1a\u9ad8\u8d28\u91cf\u53d1\u5c55\u3002<\/p>\n<figure><\/figure>\n<figure><\/figure>\n<figure class=\"aligncenter no-info-img\"><img decoding=\"async\" loading=\"lazy\" class=\"aligncenter\" src=\"https:\/\/img.cnledw.com\/wp-content\/uploads\/2024\/03\/10-1024x576.png\" alt=\"\" width=\"497\" height=\"280\" \/><figcaption style=\"display: none;\"><\/figcaption><\/figure>\n<figure class=\"aligncenter no-info-img\"><img decoding=\"async\" loading=\"lazy\" class=\"aligncenter\" src=\"https:\/\/img.cnledw.com\/wp-content\/uploads\/2024\/03\/11-1024x615.png\" alt=\"\" width=\"508\" height=\"305\" \/><figcaption style=\"display: none;\"><\/figcaption><\/figure>\n<p><strong>\u5317\u65b9\u534e\u521b<\/strong><\/p>\n<p>\u5317\u65b9\u534e\u521b\u662f\u6211\u56fd\u8bbe\u5907\u9f99\u5934\u4f01\u4e1a\uff0c\u4e5f\u662f\u76ee\u524d\u552f\u4e00\u7684\u5e73\u53f0\u7ea7\u534a\u5bfc\u4f53\u8bbe\u5907\u5382\u5546\uff08\u8bbe\u5907\u7c7b\u578b\u8986\u76d6ICP\u523b\u8680\uff08ICP+CCP\uff09\u3001\u6c89\u79ef\u8bbe\u5907\uff08PVD+CVD+ALD\uff09\u3001\u6e05\u6d17\u3001\u6c27\u5316\u3001\u9000\u706b\u3001MFC\uff08\u6c14\u4f53\u6d41\u91cf\u8d28\u91cf\u63a7\u5236\u5668\uff09\u7b49\uff09\u3002\u6b64\u6b21\u5c55\u4f1a\uff0c\u5317\u65b9\u534e\u521b\u4eae\u76f8\u4e86SiC\u7cfb\u5217\u8bbe\u5907\u4ea7\u54c1\uff0c\u8986\u76d6\u957f\u6676\u3001\u5916\u5ef6\u7b49\u5173\u952e\u73af\u8282\u3002<\/p>\n<p>\u4ece\u8fd1\u4e94\u5e74\u8d22\u62a5\u6570\u636e\u770b\uff0c\u5317\u65b9\u534e\u521b\u4ece2019\u5e74\u768440.58\u4ebf\u5143\u8425\u6536\u6210\u957f\u4e3a2023\u5e74\u7684220\u4ebf\u5143\uff082023\u5e74\u9884\u8ba1\u8425\u6536\u5728210~230\u4ebf\u5143\u95f4\uff0c\u53d6\u4e2d\u4f4d\uff09\uff0cCAGR\uff08\u5e74\u590d\u589e\u957f\u7387\uff09\u4e3a52.6\uff05\u3002\u51c0\u5229\u6da6\u4ece3.09\u4ebf\u5143\u6210\u4e3a\u81f338.80\u4ebf\u5143\uff082023\u5e74\u9884\u8ba1\u8425\u6536\u5728210~230\u4ebf\u5143\u95f4\uff0c\u53d6\u4e2d\u4f4d\uff09\uff0cCAGR\u4e3a88.2\uff05\u3002\u6bdb\u5229\u7387\u7a33\u5b9a\u572835\uff05~45\uff05\u95f4\uff0c\u5e76\u5448\u73b0\u4e0a\u5347\u8d8b\u52bf\u3002<\/p>\n<figure class=\"aligncenter no-info-img\"><img decoding=\"async\" loading=\"lazy\" class=\"aligncenter\" src=\"https:\/\/img.cnledw.com\/wp-content\/uploads\/2024\/03\/12-576x1024.jpg\" alt=\"\" width=\"507\" height=\"901\" \/><figcaption style=\"display: none;\"><\/figcaption><\/figure>\n<p><strong>\u4e2d\u5fae\u516c\u53f8<\/strong><\/p>\n<p>\u4e2d\u5fae\u516c\u53f8\u91cd\u70b9\u53d1\u5c55\u523b\u8680\uff08CCP\u4e0eICP\uff09\u3001\u7269\u7406\u6c14\u76f8\u6c89\u79ef\u548c\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\u4e09\u5927\u7c7b\u8bbe\u5907\u3002\u6b64\u5916\uff0c\u516c\u53f8\u5f00\u53d1\u7684\u5305\u62ec\u78b3\u5316\u7845\u529f\u7387\u5668\u4ef6\u3001\u6c2e\u5316\u9553\u529f\u7387\u5668\u4ef6\u7b49\u5668\u4ef6\u6240\u9700\u7684\u591a\u7c7bMOCVD\u8bbe\u5907\u4e5f\u53d6\u5f97\u4e86\u826f\u597d\u8fdb\u5c55\uff0c2024\u5e74\u5c06\u4f1a\u9646\u7eed\u8fdb\u5165\u5e02\u573a\u3002<\/p>\n<figure class=\"aligncenter no-info-img\"><img decoding=\"async\" loading=\"lazy\" class=\"aligncenter\" src=\"https:\/\/img.cnledw.com\/wp-content\/uploads\/2024\/03\/13.png\" alt=\"\" width=\"513\" height=\"289\" \/><figcaption style=\"display: none;\"><\/figcaption><\/figure>\n<p><strong>\u5927\u65cf\u534a\u5bfc\u4f53<\/strong><\/p>\n<p>\u5927\u65cf\u534a\u5bfc\u4f53\u5728\u672c\u6b21\u5c55\u4f1a\u4e2d\u5c55\u793a\u4e86\u6700\u65b0\u7814\u53d1\u7684\u5168\u81ea\u52a8\u6fc0\u5149\u5168\u5207\u673a\uff0c\u5e76\u9996\u6b21\u516c\u5f00\u5c55\u51fa\u5de5\u4e1a\u7ea7\u591a\u6ce2\u6bb5\u8109\u51b2\u6fc0\u5149\u5668\u3001100W\u98de\u79d2\u6fc0\u5149\u5668\u7b49\u3002\u78b3\u5316\u7845\u9886\u57df\uff0c\u5927\u65cf\u534a\u5bfc\u4f53\u4e3b\u8981\u5e26\u6765SiC \u6676\u952d\u6fc0\u5149\u5207\u7247\u8bbe\u5907\u3001SiC\u6fc0\u5149\u9000\u706b\u8bbe\u5907\u7b49\u4ea7\u54c1\u3002\u636e\u6089\uff0c\u5927\u65cf\u534a\u5bfc\u4f53\u4e3b\u7814\u5e94\u7528\u4e8e\u7845\u3001SiC\u3001\u7837\u5316\u9553\u3001GaN\u7b49\u6750\u6599\u7684\u52a0\u5de5\u5de5\u827a\uff0c\u5e76\u4e00\u76f4\u81f4\u529b\u5f00\u53d1\u6027\u80fd\u4f18\u5f02\u7684\u78b3\u5316\u7845\u5207\u5272\u89e3\u51b3\u65b9\u6848\u3002<\/p>\n<p><strong>\u6602\u5764\u89c6\u89c9<\/strong><\/p>\n<p>\u672c\u6b21\u5c55\u4f1a\uff0c\u6602\u5764\u89c6\u89c9\u5e26\u6765\u4e86\u65d7\u4e0b\u6700\u65b0\u7684\u5316\u5408\u7269\u534a\u5bfc\u4f53\u7684\u886c\u5e95\u548c\u5916\u5ef6\u7247\u7684\u7f3a\u9677\u68c0\u6d4b\u65b9\u6848\u3002\u516c\u5f00\u8d44\u6599\u663e\u793a\uff0c\u6602\u5764\u89c6\u89c9\u6210\u7acb\u4e8e2017\u5e74\uff0c\u662f\u4e00\u5bb6\u5149\u5b66\u6d4b\u91cf\u53ca\u68c0\u6d4b\u8bbe\u5907\u751f\u4ea7\u5546\uff0c\u4ea7\u54c1\u56fd\u9645\u95fb\u540d\u3002\u5176\u81f4\u529b\u4e8e\u4e3a\u5316\u5408\u7269\u534a\u5bfc\u4f53\u5149\u7535\u548c\u96c6\u6210\u7535\u8def\u4ea7\u4e1a\u63d0\u4f9b\u5149\u5b66\u6d4b\u91cf\u548c\u5149\u5b66\u68c0\u6d4b\u8bbe\u5907\u53ca\u89e3\u51b3\u65b9\u6848\uff0c\u73b0\u6709\u4ea7\u54c1\u5305\u62ecMOCVD\u5728\u7ebf\u76d1\u6d4b\u8bbe\u5907\u3001LED\u7167\u660e\u7f3a\u9677\u68c0\u6d4b\u8bbe\u5907\u3001\u5316\u5408\u7269\u534a\u5bfc\u4f53\u7684\u886c\u5e95\u548c\u5916\u5ef6\u7247\u7684\u7f3a\u9677\u68c0\u6d4b\u8bbe\u5907\u53ca\u96c6\u6210\u7535\u8def\u7f3a\u9677\u68c0\u6d4b\u8bbe\u5907\u7b49\u3002<\/p>\n<p><strong>\u7279\u601d\u8fea<\/strong><\/p>\n<p>\u5317\u4eac\u7279\u601d\u8fea\u672c\u6b21\u5c55\u793a\u4e86\u6700\u65b0\u7684\u51cf\u8584\u3001\u629b\u5149\u3001CMP\u8bbe\u5907\u4ea7\u54c1\u3002\u53bb\u5e7410\u6708\u672b\u6d88\u606f\uff0c\u7279\u601d\u8fea\u5b8c\u6210B\u8f6e\u878d\u8d44\uff0c\u5176\u7814\u53d1\u51fa\u76848\u82f1\u5bf8\u78b3\u5316\u7845\u5168\u81ea\u52a8\u51cf\u8584\u8bbe\u5907\u76ee\u524d\u5df2\u6295\u5165\u5e02\u573a\uff0c8\u82f1\u5bf8\u53cc\u9762\u629b\u5149\u8bbe\u5907\u5df2\u901a\u8fc7\u5de5\u827a\u6d4b\u8bd5\u8fdb\u5165\u91cf\u4ea7\u9636\u6bb5\u3002<\/p>\n<p><strong>\u7231\u53d1\u79d1\uff08ULVAC\uff09<\/strong><\/p>\n<p>\u7231\u53d1\u79d1\u672c\u6b21\u5e26\u6765\u4e86\u5148\u8fdb\u7efc\u5408\u771f\u7a7a\u89e3\u51b3\u65b9\u6848\u3002\u5176\u603b\u90e8\u4f4d\u4e8e\u65e5\u672c\uff0c\u4ee5\u771f\u7a7a\u6280\u672f\u4e3a\u6838\u5fc3\uff0cFPD\u5e73\u677f\u663e\u793a\u5236\u9020\u53caPV\u5149\u4f0f\u4ea7\u4e1a\u5236\u9020\u8bbe\u5907\u3001\u534a\u5bfc\u4f53\u53ca\u7535\u5b50\u90e8\u54c1\u5236\u9020\u8bbe\u5907\u3001\u6e85\u5c04\u9776\u6750\u6750\u6599\u3001\u5148\u7aef\u6750\u6599\u7b49\u4e3a\u4e3b\u8981\u4e1a\u52a1\u3002\u6b64\u524d\u6d88\u606f\u663e\u793a\uff0c\u7231\u53d1\u79d1\u5728\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u7684\u9886\u57df\u4e2d\u7684\u8bbe\u5907\u7c7b\u578b\u6709SiC\u529f\u7387\u534a\u5bfc\u4f53\u5668\u4ef6\u4e2d\u7684\u79bb\u5b50\u6ce8\u5165\u3001\u6e85\u5c04\u3001\u523b\u8680\u53ca\u84b8\u9540\u8bbe\u5907\uff1bGaN HEMT\u9886\u57df\u5219\u6709uGmni\u7cfb\u5217\u5e72\u6cd5\u523b\u8680\u8bbe\u5907\u7b49\u3002<\/p>\n<figure class=\"aligncenter no-info-img\"><img decoding=\"async\" loading=\"lazy\" class=\"aligncenter\" src=\"https:\/\/img.cnledw.com\/wp-content\/uploads\/2024\/03\/14.png\" alt=\"\" width=\"515\" height=\"323\" \/><figcaption style=\"display: none;\"><\/figcaption><\/figure>\n<p><strong>\u8fea\u601d\u79d1\uff08DISCO\uff09<\/strong><\/p>\n<p>\u65e5\u672c\u534a\u5bfc\u4f53\u5236\u9020\u8bbe\u5907\u4f01\u4e1a\u8fea\u601d\u79d1\u4e3b\u8981\u5728\u201c\u5207\u3001\u524a\u3001\u78e8\u201d\u6280\u672f\u65b9\u9762\u5177\u6709\u4f18\u52bf\u3002\u636e\u6089\uff0c\u8fea\u601d\u79d1\u7684\u8bbe\u5907\u7c7b\u578b\u975e\u5e38\u5e7f\u6cdb\uff0c\u4e0d\u4ec5\u662f\u901a\u7528\u4ea7\u54c1\uff0c\u8fd8\u81f4\u529b\u4e8e\u5f00\u53d1HBM\u3001\u4f7f\u7528\u7535\u529b\u6548\u7387\u9ad8\u7684\u78b3\u5316\u7845\uff08SiC\uff09\u6676\u5706\u7684\u529f\u7387\u534a\u5bfc\u4f53\u7b49\u3002\u884c\u4e1a\u6d88\u606f\u663e\u793a\uff0cDISCO\u63a8\u51fa\u7684\u5168\u65b0\u7684SiC(\u78b3\u5316\u7845)\u5207\u5272\u8bbe\u5907\uff0c\u53ef\u5c06\u78b3\u5316\u7845\u6676\u5706\u7684\u5207\u5272\u901f\u5ea6\u63d0\u9ad810\u500d\uff0c\u9996\u6279\u4ea7\u54c1\u5df2\u4ea4\u4ed8\u5ba2\u6237\u3002\u636e\u6089\uff0c\u7531\u4e8e\u78b3\u5316\u7845\u7684\u786c\u5ea6\u4ec5\u6b21\u4e8e\u91d1\u521a\u77f3\u548c\u78b3\u5316\u787c\uff0c\u786c\u5ea6\u662f\u7845\u76841.8\u500d\uff0c\u56e0\u6b64\u5207\u5272\u96be\u5ea6\u8f83\u5927\u3002<\/p>\n<p><strong>\u5fb7\u56fdCentrothern<\/strong><\/p>\n<p>centrotherm\u662f\u603b\u90e8\u4f4d\u4e8e\u5fb7\u56fd\uff0c\u662f\u5168\u7403\u9886\u5148\u7684\u70ed\u5904\u7406\u8bbe\u5907\u4f9b\u5e94\u5546\uff0c\u5df2\u670970\u591a\u5e74\u7684\u9ad8\u6e29\u70ed\u5904\u7406\u6280\u672f\u7684\u5f00\u53d1\u7ecf\u9a8c\u3002\u6b64\u6b21\u5c55\u4f1a\uff0ccentrotherm\u4e3b\u8981\u5c55\u793a\u4e86\u5feb\u901f\u70ed\u9000\u706b\u3001\u9ad8\u6e29\u70ed\u6c27\u5316\u7b49\u8bbe\u5907\u3002\u6b64\u524d\u884c\u4e1a\u6d88\u606f\u663e\u793a\uff0ccentrotherm2021\u5e748\u82f1\u5bf8\u78b3\u5316\u7845\u7089\u7ba1\u8bbe\u5907\u5efa\u7acb\u4e86\u8f83\u4e3a\u6210\u719f\u7684\u8bbe\u5907\u5e73\u53f0\u4f53\u7cfb\uff0c\u5176\u4e09\u79cd\u70ed\u5904\u7406\u8bbe\u5907\uff08\u6805\u6781\u6c27\u5316\u7089\u3001\u9000\u706b\u7089\u3001\u5feb\u901f\u70ed\u5904\u7406\uff09\u5747\u53ef\u517c\u5bb96\/8\u82f1\u5bf8\u3002<\/p>\n<figure class=\"aligncenter no-info-img\"><img decoding=\"async\" loading=\"lazy\" class=\"aligncenter\" src=\"https:\/\/img.cnledw.com\/wp-content\/uploads\/2024\/03\/15.png\" alt=\"\" width=\"500\" height=\"277\" \/><figcaption style=\"display: none;\"><\/figcaption><\/figure>\n<p><strong>\u5fb7\u56fdPVA TePla<\/strong><\/p>\n<p>\u5fb7\u56fd PVA TePla\u662f\u5168\u7403\u78b3\u5316\u7845\u8bbe\u5907\u884c\u4e1a\u9690\u5f62\u51a0\u519b\uff0c\u5176\u4e3b\u8981\u4ea7\u54c1\u662f\u5927\u5c3a\u5bf8\u7845\u6676\u4f53\u4ee5\u53ca6\u5bf8\u30018\u5bf8\u78b3\u5316\u7845\u6676\u4f53\u6750\u6599\u751f\u957f\u8bbe\u5907\uff0c\u5728\u672c\u6b21\u5c55\u4f1a\u4e2d\u5fb7\u56fd PVA TePla \u5411\u4e1a\u754c\u5c55\u793a\u4e86\u591a\u6b3e\u524d\u6cbf\u6280\u672f\u4ea7\u54c1\uff0c<\/p>\n<p>\u5e76\u5e26\u6765\u4e86\u4e3a\u4e2d\u56fd\u5e02\u573a\u5b9a\u5236\u7684\u78b3\u5316\u7845\u6676\u4f53\u751f\u957f\u8bbe\u5907\u201cSICN\u201d\uff0c\u5176\u91c7\u7528\u7684\u662f\u7269\u7406\u6c14\u8c61\u4f20\u8f93\u5de5\u827aPVT\u6cd5\u751f\u4ea7\u78b3\u5316\u7845\u6676\u4f53\uff0c\u9884\u8ba1\u8ba1\u5212\u4eca\u5e74\u4e8c\u5b63\u5ea6\u6295\u5165\u5e02\u573a\u3002<\/p>\n<figure class=\"aligncenter no-info-img\"><img decoding=\"async\" loading=\"lazy\" class=\"aligncenter\" src=\"https:\/\/img.cnledw.com\/wp-content\/uploads\/2024\/03\/16-1-1024x742.png\" alt=\"\" width=\"519\" height=\"376\" \/><figcaption style=\"display: none;\"><\/figcaption><\/figure>\n<p style=\"text-align: center;\">PVA TePla\u63a8\u51fa\u7684SICN\u65b0\u54c1\u4f18\u52bf<\/p>\n<p style=\"text-align: left;\"><strong>\u4e0a\u6d77\u90a6\u82af\u534a\u5bfc\u4f53<\/strong><\/p>\n<p>\u4e0a\u6d77\u7684\u90a6\u82af\u534a\u5bfc\u4f53\u4e3b\u8981\u4e3a\u5ba2\u6237\u63d0\u4f9b\u5168\u65b9\u4f4d\u7684\u89e3\u51b3\u65b9\u6848\uff0c\u672c\u6b21\u5c55\u4f1a\u4e2d\u90a6\u82af\u534a\u5bfc\u4f53\u5728\u5316\u5408\u7269\u7aef\u5e26\u6765\u7684\u8bbe\u5907\u4e3b\u8981\u662fHongHu TSG150W\/200WD\uff0c\u7528\u4e8e6\/8\u82f1\u5bf8\u529f\u7387\u534a\u5bfc\u4f53\u5de5\u827aWCVD\u8bbe\u5907\u3002HongHu Lvory 150W\/200WD\uff0c\u7528\u4e8e6\/8\u5316\u5408\u7269\u534a\u5bfc\u4f53\u52a0\u5de5\u5de5\u827aICP\u523b\u8680\u8bbe\u5907\u3002HongHu Coral 150W\/200WD\uff0c\u7528\u4e8e6\/8\u5316\u5408\u7269\u534a\u5bfc\u4f53\u52a0\u5de5\u5de5\u827aCCP\u523b\u8680\u8bbe\u5907\u3002<\/p>\n<figure class=\"aligncenter no-info-img\"><img decoding=\"async\" loading=\"lazy\" class=\"aligncenter\" src=\"https:\/\/img.cnledw.com\/wp-content\/uploads\/2024\/03\/17-1024x547.png\" alt=\"\" width=\"515\" height=\"275\" \/><\/figure>\n<figure class=\"aligncenter no-info-img\"><figcaption style=\"display: none;\"><\/figcaption><\/figure>\n<figure class=\"aligncenter no-info-img\"><img decoding=\"async\" loading=\"lazy\" class=\"aligncenter\" src=\"https:\/\/img.cnledw.com\/wp-content\/uploads\/2024\/03\/18-1024x546.png\" alt=\"\" width=\"509\" height=\"271\" \/><figcaption style=\"display: none;\"><\/figcaption><\/figure>\n<p><strong>\u601d\u9510\u667a\u80fd<\/strong><\/p>\n<p>\u672c\u6b21\u5c55\u4f1a\uff0c\u9752\u5c9b\u601d\u9510\u667a\u80fd\u5e26\u6765\u4e86\u79bb\u5b50\u6ce8\u5165\uff08IMP\uff09\u548c\u539f\u5b50\u5c42\u6c89\u79ef\uff08ALD\uff09\u6280\u672f\u4eae\u76f8\uff0c\u4eca\u5e743\u67081\u65e5\uff0c\u9752\u5c9b\u56db\u65b9\u601d\u9510\u667a\u80fd\u6280\u672f\u6709\u9650\u516c\u53f8\u5ba3\u5e03\u5b8c\u6210\u4e86\u6570\u4ebf\u5143B\u8f6e\u878d\u8d44\u3002\u601d\u9510\u667a\u80fd\u805a\u7126\u5173\u952e\u534a\u5bfc\u4f53\u524d\u9053\u5de5\u827a\u8bbe\u5907\u7684\u7814\u53d1\u3001\u751f\u4ea7\u548c\u9500\u552e\uff0c\u63d0\u4f9b\u5177\u6709\u81ea\u4e3b\u53ef\u63a7\u7684\u6838\u5fc3\u5173\u952e\u6280\u672f\u7684\u7cfb\u7edf\u88c5\u5907\u4ea7\u54c1\u548c\u6280\u672f\u670d\u52a1\u65b9\u6848\u3002\u76ee\u524d\uff0c\u601d\u9510\u667a\u80fd\u5df2\u5f62\u6210\u201c\u53cc\u4e3b\u4e1a\u201d\u5e03\u5c40\uff0c\u516c\u53f8\u4ea7\u54c1\u5305\u62ec\u539f\u5b50\u5c42\u6c89\u79ef\uff08ALD\uff09\u8bbe\u5907\u53ca\u79bb\u5b50\u6ce8\u5165\uff08IMP\uff09\u8bbe\u5907\u3002\u5e7f\u6cdb\u5e94\u7528\u4e8e\u96c6\u6210\u7535\u8def\u3001\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u3001\u65b0\u80fd\u6e90\u3001\u5149\u5b66\u3001\u96f6\u90e8\u4ef6\u9540\u819c\u7b49\u8bf8\u591a\u9ad8\u7cbe\u5c16\u9886\u57df\u3002<\/p>\n<p><strong>\u676d\u5dde\u897f\u6e56\u4eea\u5668<\/strong><\/p>\n<p>\u676d\u5dde\u897f\u6e56\u4eea\u5668\u6210\u7acb\u4e8e2021\u5e7412\u6708\u4e3b\u8425SiC\u78b3\u5316\u7845\u886c\u5e95\u6fc0\u5149\u5207\u7247\u53ca\u5265\u79bb\u8bbe\u5907\u3002\u516c\u53f8\u73b0\u6709\u4ea7\u54c1\u4e3b\u8981\u6709SiC\u886c\u5e95\u6fc0\u5149\u5207\u7247\u3001\u5265\u79bb\u8bbe\u5907\uff0c\u5e76\u6709SiC\u6fc0\u5149\u5e73\u5766\u5316\u3001\u6fc0\u5149\u68c0\u6d4b\u3001\u6fc0\u5149\u5212\u7247\u8bbe\u5907\u3001\u6fc0\u5149\u629b\u5149\u8bbe\u5907\u6b63\u5728\u7814\u53d1\u4e2d\u3002<\/p>\n<figure 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