{"id":64614,"date":"2023-07-17T17:46:36","date_gmt":"2023-07-17T09:46:36","guid":{"rendered":"https:\/\/www.cnledw.com\/?p=64614"},"modified":"2023-07-17T17:30:49","modified_gmt":"2023-07-17T09:30:49","slug":"%e5%8f%88%e4%b8%80%e5%85%ac%e5%8f%b8cvd%e8%ae%be%e5%a4%87%e5%8f%91%e8%b4%a7%ef%bc%8c%e5%9b%bd%e4%ba%a7%e5%8c%96%e5%88%b0%e5%93%aa%e6%ad%a5%e4%ba%86%ef%bc%9f","status":"publish","type":"post","link":"https:\/\/www.cnledw.com\/SiC\/newsdetail-64614.html","title":{"rendered":"\u53c8\u4e00\u516c\u53f8CVD\u8bbe\u5907\u53d1\u8d27\uff0c\u56fd\u4ea7\u5316\u5230\u54ea\u6b65\u4e86\uff1f"},"content":{"rendered":"

7\u670816\u65e5\uff0c\u5fae\u5bfc\u7eb3\u7c73\u53d1\u5e03\u5b98\u65b9\u6d88\u606f\uff0c\u516c\u53f8\u7684\u9996\u53f0\u534a\u5bfc\u4f53CVD\u8584\u819c\u6c89\u79ef\u8bbe\u5907\u987a\u5229\u53d1\u8d27\u3002\u5fae\u5bfc\u7eb3\u7c73\u7684iTronix\u00ae\u7cfb\u5217CVD\u8584\u819c\u6c89\u79ef\u8bbe\u5907\uff0c\u4e3b\u8981\u7528\u4e8e\u5236\u5907\u6c27\u5316\u7845\u3001\u6c2e\u5316\u7845\u3001\u6c2e\u6c27\u5316\u7845\u3001\u975e\u6676\u7845\u7b49\u4e0d\u540c\u79cd\u7c7b\u8584\u819c\uff0c\u53ef\u5e94\u7528\u4e8e\u903b\u8f91\u3001\u5b58\u50a8\u3001\u5148\u8fdb\u5c01\u88c5\u3001\u663e\u793a\u5668\u4ef6\u4ee5\u53ca\u5316\u5408\u7269\u534a\u5bfc\u4f53\u7b49\u9886\u57df\u82af\u7247\u5236\u9020\u3002<\/p>\n

\"\"<\/p>\n

CVD\u8bbe\u5907\u9700\u6c42\u63d0\u5347<\/strong><\/p>\n

\u8584\u819c\u6c89\u79ef\u5206\u4e3a\u7269\u7406\u6c14\u76f8\u6c89\u79ef\uff08PVD\uff09\u548c\u5316\u5b66\u6c14\u76f8\u6c89\u79ef\uff08CVD\uff09\u4e24\u5927\u7c7b\uff0c\u524d\u8005\u4f7f\u7528\u7269\u7406\u7684\u65b9\u6cd5\uff08\u5982\u84b8\u53d1\u3001\u6e85\u5c04\u7b49\uff09\u4f7f\u9540\u819c\u6750\u6599\u6c7d\u5316\uff0c\u5728\u57fa\u4f53\u8868\u9762\u6c89\u79ef\u6210\u819c\uff0c\u540e\u8005\u5219\u5229\u7528\u6c14\u6001\u6216\u84b8\u6c7d\u6001\u7684\u7269\u8d28\u5728\u6c14\u76f8\u6216\u6c14\u56fa\u754c\u9762\u4e0a\u53d1\u751f\u53cd\u5e94\u751f\u6210\u56fa\u6001\u6c89\u79ef\u7269\u3002<\/p>\n

\u5f53\u524dSiC\u8584\u819c\u751f\u957f\u4e3b\u8981\u662f\u4ee5CVD\u4e3a\u4e3b\uff0c\u5305\u62ec\u5206\u5b50\u675f\u5916\u5ef6\u3001\u78c1\u63a7\u6e85\u5c04\u548c\u8109\u51b2\u6fc0\u5149\u6dc0\u79ef\u7b49,CVD\u7684\u4f18\u52bf\u5728\u4e8e\u53ef\u4ee5\u7cbe\u786e\u63a7\u5236\u5916\u5ef6\u819c\u539a\u5ea6\u548c\u63ba\u6742\u6d53\u5ea6\u3001\u7f3a\u9677\u8f83\u5c11\u3001\u751f\u957f\u901f\u5ea6\u9002\u4e2d\u3001\u8fc7\u7a0b\u53ef\u81ea\u52a8\u63a7\u5236\u7b49\u4f18\u70b9\uff0c\u662f\u76ee\u524d\u5df2\u7ecf\u6210\u529f\u5546\u4e1a\u5316\u7684SiC\u5916\u5ef6\u6280\u672f\u3002<\/p>\n

\"\"
<\/figcaption><\/figure>\n

\u8bc4\u4ef7\u4e00\u6b3e\u78b3\u5316\u7845CVD\u7684\u6838\u5fc3\u6307\u6807\uff0c\u4e3b\u8981\u4ece\u5916\u5ef6\u751f\u957f\u6027\u80fd\uff08\u539a\u5ea6\u5747\u5300\u6027\u3001\u63ba\u6742\u5747\u5300\u6027\u3001\u7f3a\u9677\u7387\u548c\u751f\u957f\u901f\u7387\uff09\uff0c\u8bbe\u5907\u672c\u8eab\u6e29\u5ea6\u6027\u80fd\uff08\u5347\u6e29\/\u964d\u6e29\u901f\u7387\u3001\u6700\u9ad8\u6e29\u5ea6\u3001\u6e29\u5ea6\u5747\u5300\u6027\uff09\uff0c\u548c\u8bbe\u5907\u6027\u4ef7\u6bd4\u4e09\u4e2a\u65b9\u9762\u8fdb\u884c\u8bc4\u5224\u3002<\/p>\n

\u4ece\u6574\u4e2a\u534a\u5bfc\u4f53\u884c\u4e1a\u6765\u770b\uff0c\u5f53\u524d\u56fd\u5185 CVD \u7684\u56fd\u4ea7\u5316\u7387\u8fd8\u5904\u4e8e\u8f83\u4f4e\u6c34\u5e73\uff0c\u4ece\u6574\u4e2a\u534a\u5bfc\u4f53\u5e02\u573a\u6765\u770b\uff0c\u7f8e\u56fd\u7684\u5e94\u7528\u6750\u6599\uff08Applied Materials\uff09\u3001\u6cdb\u6797\uff08Lam Research\uff09\u548c\u65e5\u672c\u7684\u4e1c\u4eac\u7535\u5b50\uff08TEL\uff09\u662f\u5168\u7403CVD\u7684\u4e3b\u8981\u4f9b\u5e94\u5546\u3002<\/p>\n

\u800c\u5728\u78b3\u5316\u7845\u9886\u57df\uff0c\u4ec5\u8003\u8651\u5916\u5ef6\u73af\u8282\uff0cCVD\u8bbe\u5907\u7684\u4e3b\u8981\u4f9b\u5e94\u5546\u4e3a\u5fb7\u56fd\u7684Aixtron\u3001\u610f\u5927\u5229\u7684LPE\u3001\u65e5\u672c\u7684\u4e1c\u4eac\u7535\u5b50\uff08TEL\uff09\u548cNuflare\u3002<\/p>\n

\u4e14\u6839\u636e\u76f8\u5173\u4fe1\u606f\uff0c6\u82f1\u5bf8\u5916\u5ef6\u8bbe\u5907\u96c6\u4e2d\u5728\u610f\u5927\u5229\u7684LPE \u548c\u65e5\u672c\u7684 NuFlare\uff0c\u800c NuFlare\u4e3b\u8981\u662f\u4f9b\u7ed9Wolfspeed \u548c II-VI\uff08\u66f4\u540d\u4e3aCoherent\uff09\uff0c\u4e14\u6570\u91cf\u4ec5\u4e3a\u5341\u4f59\u53f0\u6bcf\u5e74\uff0c\u5176\u5728\u4e2d\u56fd\u51fa\u552e\u5df2\u7ecf\u6392\u81f3 2023\u4e0b\u534a\u5e74\uff0c\u6bcf\u53f0\u8bbe\u8ba1\u4ea7\u80fd\u4e3a 1800 \u7247\/\u6708\u3002\u65e5\u672c\u4e1c\u4eac\u7535\u5b50\uff08TEL\uff09\u7684\u8bbe\u5907\u4e3b\u8981\u91c7\u7528\u53cc\u8154\u4f53\uff0c\u5bf9\u63d0\u9ad8\u4ea7\u91cf\u6709\u4e00\u5b9a\u7684\u4f5c\u7528\uff0c\u4f46\u56e0\u4ef7\u683c\u548c\u6280\u672fIP\u7b49\u95ee\u9898\uff0c\u8f83\u5c11\u51fa\u73b0\u5728\u56fd\u5185\u5e02\u573a\u4e2d\u3002<\/p>\n

\u56fd\u4ea7\u78b3\u5316\u7845\u5916\u5ef6\u8bbe\u5907\u6700\u65b0\u8fdb\u5c55<\/strong><\/p>\n

\u4eca\u5e742\u6708\uff0c\u6676\u76db\u673a\u7535\u53d1\u5e03\u4e866\u82f1\u5bf8\u53cc\u7247\u5f0fSiC\u5916\u5ef6\u8bbe\u5907\uff0c\u8be5\u8bbe\u5907\u901a\u8fc7\u5bf9\u53cd\u5e94\u5ba4\u77f3\u58a8\u4ef6\u7684\u6539\u9020\uff0c\u91c7\u7528\u4e0a\u4e0b\u5c42\u53e0\u52a0\u7684\u65b9\u5f0f\uff0c\u5355\u7089\u53ef\u4ee5\u751f\u957f\u4e24\u7247\u5916\u5ef6\u7247\uff0c\u4e14\u4e0a\u4e0b\u5c42\u5de5\u827a\u6c14\u4f53\u53ef\u4ee5\u5355\u72ec\u8c03\u63a7\uff0c\u6e29\u5dee\u22645\u2103\uff0c\u6709\u6548\u5f25\u8865\u4e86\u5355\u7247\u6c34\u5e73\u5f0f\u5916\u5ef6\u7089\u4ea7\u80fd\u4e0d\u8db3\u7684\u52a3\u52bf\u3002<\/p>\n

5\u6708\uff0c\u7ca4\u5347\u516c\u53f8\u5ba3\u5e03\u5176\u81ea\u4e3b\u7814\u53d1\u76844\/6\u540bSiC\u5916\u5ef6\u8bbe\u5907\uff0c\u5df2\u65e0\u6545\u969c\u8fde\u7eed\u7a33\u5b9a\u8fd0\u884c\u8fd1300\u5c0f\u65f6\uff0c\u751f\u957f\u76844\/6\u540bSiC\u5916\u5ef6\u7247\u8d28\u91cf\u5747\u8fbe\u5230\u56fd\u9645\u5148\u8fdb\u6c34\u5e73\uff0c\u6ee1\u8db3MOSFET\u548cSBD\u5668\u4ef6\u7684\u5236\u5907\u8981\u6c42\u3002<\/p>\n

\u540c\u6708\uff0c\u201c\u957f\u57ce\u63a7\u80a1\u62db\u6807\u4e2d\u5fc3\u201d\u53d1\u6587\u79f0\uff0c\u5176\u5df2\u542f\u52a8\u201c\u7cbe\u5de5\u81ea\u52a8\u5316\u78b3\u5316\u7845\u5916\u5ef6\u5382\u623f\u6539\u9020\u8bbe\u8ba1\u9879\u76ee\u201d\uff0c\u76ee\u524d\u6b63\u5728\u8fdb\u884c\u62db\u6807\u5de5\u4f5c\u3002<\/p>\n

\u6b64\u5916\uff0c\u76d0\u57ce\u5e02\u76d0\u90fd\u533a\u4eba\u6c11\u653f\u5e9c\u62a5\u9053\u63d0\u5230\uff0c\u6c49\u5370\u673a\u75352022\u5e74\u6295\u8d44\u4e8610\u4ebf\u5143\uff0c\u542f\u52a8\u6c49\u5370\u534a\u5bfc\u4f53\u88c5\u5907\u9879\u76ee\uff0c\u65b0\u4e0a40\u53f0\uff08\u5957\uff09\u7b2c\u4e09\u4ee3\u534a\u5bfc\u4f53\u78b3\u5916\u5ef6\u8bbe\u5907\uff0c\u53ef\u5e74\u4ea720\u4e07\u7247\u78b3\u5316\u7845\u5916\u5ef6\u7247\u3002\uff08\u6587\uff1a\u96c6\u90a6\u5316\u5408\u7269\u534a\u5bfc\u4f53Jump\uff09<\/p>\n

\u66f4\u591aSiC\u548cGaN\u7684\u5e02\u573a\u8d44\u8baf\uff0c\u8bf7\u5173\u6ce8\u5fae\u4fe1\u516c\u4f17\u8d26\u53f7\uff1a\u96c6\u90a6\u5316\u5408\u7269\u534a\u5bfc\u4f53\u3002<\/strong><\/p>\n","protected":false},"excerpt":{"rendered":"

7\u670816\u65e5\uff0c\u5fae\u5bfc\u7eb3\u7c73\u53d1\u5e03\u5b98\u65b9\u6d88\u606f\uff0c\u516c\u53f8\u7684\u9996\u53f0\u534a\u5bfc\u4f53CVD\u8584\u819c\u6c89\u79ef\u8bbe\u5907\u987a\u5229\u53d1\u8d27\u3002\u5fae\u5bfc\u7eb3\u7c73\u7684iTronix\u00ae\u7cfb\u5217C […]<\/p>\n","protected":false},"author":127,"featured_media":64616,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"footnotes":""},"categories":[872],"tags":[1203,64],"_links":{"self":[{"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/posts\/64614"}],"collection":[{"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/posts"}],"about":[{"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/types\/post"}],"author":[{"embeddable":true,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/users\/127"}],"replies":[{"embeddable":true,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/comments?post=64614"}],"version-history":[{"count":1,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/posts\/64614\/revisions"}],"predecessor-version":[{"id":64617,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/posts\/64614\/revisions\/64617"}],"wp:featuredmedia":[{"embeddable":true,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/media\/64616"}],"wp:attachment":[{"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/media?parent=64614"}],"wp:term":[{"taxonomy":"category","embeddable":true,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/categories?post=64614"},{"taxonomy":"post_tag","embeddable":true,"href":"https:\/\/www.cnledw.com\/wp-json\/wp\/v2\/tags?post=64614"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}